DATA SHEET MS Series The MS Series is a surface-mountable pressure monitoring device suitable for low to medium pressure applications. COMPANY: Merit Sensor is a leader in piezoresistive pressure sensing and partners with clients to create high performing solutions for a variety of applications and industries. SENTIUM: Merit Sensor products incorporate a proprietary Sentium technology, developed to provide a best-in-class operating temperature range (-40C to 85C) and superior stability. TECHNOLOGY: Merit Sensor utilizes a piezoresistive Wheatstone bridge in a design that anodically bonds glass to a chemically etched silicon diaphragm. All products are RoHS compliant. CAPABILITIES: Merit Sensor designs, engineers, fabricates, dices, assembles, and tests products from a state-of-the-art MS Series Part Number Configurator facility near Salt Lake City, Utah. MXX-XXXX-XX Impedance Cover 1 = 5kohm 1 = No Gel FEATURES Closed Bridge 1,2 2 = Gel Range 5 to 500 psi (0.34 to 34.5 bar 34.5 Type to 3,447 KPa) 1 = Absolute 2= Gage Pressure Absolute, gage, differential, vacuum PSI Cap 0005 = 5 psi Media Clean, dry air and non-corrosive gases (No Gel) 1 = Ceramic 0015 = 15 psi Liquids compatible with silicone (Gel option) Cap 0050 = 50 psi 2 = Round Ceramic 0100 = 100 psi Packaging Tape & Reel 0300 = 300 psi Chimney 0500 = 500 psi Flexibility Sensitivity, bridge, type, etc. Example: M11-0015-11 offers 5kohm Impedance, BENEFITS Closed Bridge, Absolute Constraint, 15 psi, Ceramic Cap, No Gel Performance Enjoy best-in-class performance due to Merits proprietary Sentium technology. 1 2 Not available with cap. Not available above 100 psi. Cost Save money over time with high-performing MEMS Security Feel confident doing business with an experienced company backed by a solid parent company (NASDAQ: MMSI) Speed Get to market quickly with creative and flexible solutions. Service Experience prompt, personal, and professional support. Sales +1 801.208.4722 Customer Service +1 801.208.4700 Fax +1 801.208.4798 sensors merit.com www.MeritSensor.com 1600 W. Merit Parkway South Jordan, Utah 84095 USA MSseriesDS.008MS Series SPECIFICATIONS Parameter Minimum Typical Maximum Units Notes Electrical & Environmental Excitation (In) 5 15 V Maximum: 3 mA Impedance 4000 5000 6000 Operating Temperature -40 85 C Sentium technology Storage Temperature -55 160 C Performance Offset -10 0 10 mV/V Zero pressure gage only 25C Non-linearity -0.2 0 0.2 % FSO Best Fit Straight Line 25C Pressure Hysteresis -0.1 0 0.1 % FSO 25C Temp Coeff Zero -25 0 25 V/V/C -40C to 85C Temp Coeff Resistance 2300 2800 3300 PPM/C -40C to 85C Temp Coeff Sensitivity -1500 -2200 -2500 PPM/C -40C to 85C Thermal Hysteresis -0.1 0 0.1 % FSO Zero pressure Burst Pressure 2X Room Temperature Full-Scale Output ( 5 volts excitation) 5 psi (0.34 bar 34.5 KPa) 75 100 125 mV 15 psi (1 bar 103 KPa) 60 75 90 mV 50 psi (3.4 bar 345 KPa) 100 125 150 mV Closed bridge only 100 psi (6.9 bar 689 KPa) 120 150 180 mV 300 psi (20.7 bar 2068 KPa) 120 150 180 mV 500 psi (34.5 bar 3447 KPa) 140 175 210 mV DIMENSIONS AND ELECTRICAL (millimeters) PACKAGING AND SHIPPING (millimeters) Ceramic cap Round chimney Top View Top View 4.0mm Top View Top View 5.8 4.0 5.8 4.0 2.0mm 0 0 0 0 Out - 1.3 Out - 1.3 1.3 Out - 1.3 Out - 0.5 Dia. hole In - 2.5 In - 2.5 0.5 Dia. hole 2.5 In - 2.5 In - In + 3.8 3.8 In + 3.8 3.8 In + In + Out + 5.1 Out + 5.1 5.1 Out + 5.1 Out + 24.0mm 6.4 6.4 6.4 6.4 White box indicates active side White box indicates active side Bottom View Bottom View Bottom View Bottom View Bottom View Top View 0.6 Pad Width 0.6 Pad Width 0.6 Pad Width 0.6 Pad Width 5.8 4.0 Out - Out - Out - Out - White box indicates 16.0mm 0.6 Pad Width 0 active side In - In - In - In - Out - In + In + In + In + 1.3 Out - Out + Out + Out + Out + In - 2.5 In - Ag/Pt Solder Pads 0.4 Dia hole on Ag/Pt Solder Pads 0.4 Dia hole on Ag/Pt Solder Pads 0.4 Dia hole on Ag/Pt Solder Pads 0.4 Dia hole on gage parts only gage parts only gage parts only gage parts only In + Side View Side View 3.8 In + Side View 5.8 Side View 5.8 3.8 3.8 5.1 5.1 Out + 2.9 2.9 5.1 Out + 0.6 0.6 0.6 0.6 0 6.4 0 0 0 Ag/Pt Solder Pads 0.4 Dia hole on Absolute and Gage available gage parts only Side View Sales +1 801.208.4722 Customer Service +1 801.208.4700 Fax +1 801.208.4798 sensors merit.com www.MeritSensor.com 5.8 1600 W. Merit Parkway South Jordan, Utah 84095 USA 3.8 0.6 0 00 00 1.51.5 4.44.4 4.94.9 6.46.4 6.46.4 0 00 0 1.5 1.5 4.4 4.4 4.9 4.9 6.4 6.4 6.4 6.4 0 6.4 0 1.5 4.4 4.9 6.4