SCA100T-D02 Murata

Product Family Specification SCA100T Series Data Sheet THE SCA100T DUAL AXIS INCLINOMETER SERIES The SCA100T Series is a 3D-MEMS-based dual axis inclinometer family that provides instrumentation grade performance for leveling applications. The measuring axes of the sensing elements are parallel to the mounting plane and orthogonal to each other. Low temperature dependency, high resolution and low noise, together a with robust sensing element design, make the SCA100T the ideal choice for leveling instruments. The Murata inclinometers are unsensitive to vibration, due to their over damped sensing elements, and can withstand mechanical shocks of up to 20000 g. Features Dual axis inclination measurement (X and Y) Digital SPI inclination and temperature output Measuring ranges 30 SCA100T-D01 and Comprehensive failure detection features 90 SCA100T-D02 o True self test by deflecting the sensing elements proof mass by electrostatic force. 0.0035 resolution (10 Hz BW, analog output) o Continuous sensing element interconnection Sensing element controlled over damped failure check. frequency response (-3dB 18Hz) o Continuous memory parity check. Robust design, high shock durability (20000g) RoHS compliant High stability over temperature and time Compatible with Pb-free reflow solder process Single +5 V supply Ratiometric analog voltage outputs Applications Platform leveling and stabilization Leveling instruments 360 vertical orientation measurement Construction levels 12 VDD Sensing Signal conditioning 11 OUT 1 element 1 and filtering A/D conversion 10 ST 1 Self test 1 EEPROM Temperature calibration Sensor 1 SCK memory 9 ST 2 Self test 2 3 MISO SPI interface 4 MOSI 7 CSB Sensing Signal conditioning 5 OUT 2 element 2 and filtering 6 GND Figure 1. Functional block diagram Murata Electronics Oy Subject to changes 1/17 www.muratamems.fi Doc.Nr. 8261800 Rev.B2 SCA100T Series TABLE OF CONTENTS The SCA100T Dual Axis Inclinometer Series ......................................................................... 1 Features............................................................................................................................................. 1 Applications ...................................................................................................................................... 1 Table of Contents...................................................................................................................... 2 1 Electrical Specifications ..................................................................................................... 3 1.1 Absolute Maximum Ratings ................................................................................................... 3 1.2 Performance Characteristics .................................................................................................. 3 1.3 Electrical Characteristics ....................................................................................................... 4 1.4 SPI Interface DC Characteristics ............................................................................................ 4 1.5 SPI Interface AC Characteristics ............................................................................................ 4 1.6 SPI Interface Timing Specifications ....................................................................................... 5 1.7 Electrical Connection.............................................................................................................. 6 1.8 Typical Performance Characteristics .................................................................................... 6 1.8.1 Additional External Compensation ...................................................................................... 7 2 Functional Description ....................................................................................................... 9 2.1 Measuring Directions .............................................................................................................. 9 2.2 Voltage to Angle Conversion ................................................................................................. 9 2.3 Ratiometric Output ................................................................................................................ 10 2.4 SPI Serial Interface ................................................................................................................ 10 2.5 Digital Output to Angle Conversion ..................................................................................... 12 2.6 Self Test and Failure Detection Modes ................................................................................ 13 2.7 Temperature Measurement .................................................................................................. 14 3 Application Information .................................................................................................... 15 3.1 Recommended Circuit Diagrams and Printed Circuit Board Layouts ............................... 15 3.2 Recommended Printed Circuit Board Footprint ................................................................. 16 4 Mechanical Specifications and Reflow Soldering .......................................................... 16 4.1 Mechanical Specifications (Reference only) ....................................................................... 16 4.2 Reflow Soldering ................................................................................................................... 17 Murata Electronics Oy Subject to changes 2/17 www.muratamems.fi Doc. nr. 8261800 Rev.B2