Precision, Miniature MEMS IMU Data Sheet ADIS16507 FEATURES GENERAL DESCRIPTION Triaxial, digital gyroscope The ADIS16507 is a precision, miniature microelectromechanical 125/sec, 500/sec, 2000/sec dynamic range models system (MEMS) inertial measurement unit (IMU) that includes 2.3/hr in-run bias stability (ADIS16507-1) a triaxial gyroscope and a triaxial accelerometer. Each inertial 0.13/hr angular random walk, x-axis and y-axis, 1 sensor in the ADIS16507 combines with signal conditioning (ADIS16507-1) that optimizes dynamic performance. The factory calibration 0.25 axis to axis misalignment error characterizes each sensor for sensitivity, bias, alignment, Triaxial, digital accelerometer, 392 m/sec dynamic range linear acceleration (gyroscope bias), and point of percussion 125 m/sec in-run bias stability, x-axis and y-axis, 1 (accelerometer location). As a result, each sensor has dynamic Triaxial, delta angle and delta velocity outputs compensation formulas that provide accurate sensor Factory calibrated sensitivity, bias, and axial alignment measurements over a broad set of conditions. Calibration temperature range: 40C to +85C The ADIS16507 provides a simplified, cost effective method for SPI compatible data communications integrating accurate, multiaxis inertial sensing into industrial Programmable operation and control systems, especially when compared with the complexity and Automatic and manual bias correction controls investment associated with discrete designs. All necessary motion Data ready indicator for synchronous data acquisition testing and calibration are part of the production process at the External sync modes: direct, scaled, and output factory, greatly reducing system integration time. Tight orthogonal On demand self-test of inertial sensors alignment simplifies inertial frame alignment in navigation On demand self-test of flash memory systems. The serial peripheral interface (SPI) and register Single-supply operation (VDD): 3.0 V to 3.6 V structure provide a simple interface for data collection and 2 19,600 m/sec mechanical shock survivability configuration control. Operating temperature range: 40C to +105C The ADIS16507 is available in a 100-ball, ball grid array (BGA) APPLICATIONS package that is approximately 15 mm 15 mm 5 mm. Navigation, stabilization, and instrumentation Unmanned and autonomous vehicles Smart agriculture and construction machinery Factory/industrial automation, robotics Virtual/augmented reality Internet of Moving Things FUNCTIONAL BLOCK DIAGRAM DR RST VDD POWER SELF TEST INPUT/OUTPUT GND MANAGEMENT OUTPUT CS TRIAXIAL DATA GYROSCOPE REGISTERS SCLK CALIBRATION TRIAXIAL SPI CONTROLLER AND ACCELEROMETER DIN FILTERS USER CONTROL TEMPERATURE DOUT REGISTERS SENSOR CLOCK ADIS16507 SYNC Figure 1. Rev. A Document Feedback Information furnished by Analog Devices is believed to be accurate and reliable. However, no responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A. rights of third parties that may result from its use. Specifications subject to change without notice. Tel: 781.329.4700 20192020 Analog Devices, Inc. All rights reserved. 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Technical Support www.analog.com 17329-001ADIS16507 Data Sheet TABLE OF CONTENTS Features .............................................................................................. 1 SPI ................................................................................................ 18 Applications ...................................................................................... 1 Data Ready (DR) ........................................................................ 18 General Description ......................................................................... 1 Reading Sensor Data .................................................................. 19 Functional Block Diagram .............................................................. 1 Burst Read Function .................................................................. 20 Revision History ............................................................................... 2 Latency ......................................................................................... 22 Specifications .................................................................................... 3 Device Configuration ................................................................ 22 Timing Specifications .................................................................. 6 Memory Structure ...................................................................... 22 Absolute Maximum Ratings ....................................................... 7 User Register Memory Map .......................................................... 23 Thermal Resistance ...................................................................... 7 User Register Defintions ............................................................... 25 ESD Caution.................................................................................. 7 Gyroscope Data .......................................................................... 25 Pin Configuration and Function Descriptions ............................ 8 Delta Angles ................................................................................ 29 Typical Performance Characteristics ........................................... 11 Delta Velocity ............................................................................. 30 Gyroscopes .................................................................................. 11 Calibration .................................................................................. 32 Accelerometers ........................................................................... 14 Applications Information ............................................................. 39 Theory of Operation ...................................................................... 16 Assembly and Handling Tips ................................................... 39 Introduction ................................................................................ 16 Power Supply Considerations .................................................. 40 Clock Control ............................................................................. 16 Evaluation Tools ......................................................................... 40 Bartlett Window Filter ............................................................... 17 Packaging and Ordering Information ......................................... 42 Calibration ................................................................................... 17 Outline Dimensions ................................................................... 42 Decimation Filter ....................................................................... 17 Ordering Guide .......................................................................... 42 Register Structure ....................................................................... 17 REVISION HISTORY 7/2020Rev. 0 to Rev. A Deleted Continuous Bias Estimation (NULL CNFG) Section, Change to Features Section ............................................................. 1 Table 111, and Table 112 Renumbered Sequentially ............... 36 Changes to Table 1 ........................................................................... 3 Changes to Table 112 ..................................................................... 37 Changes to Table 3 and Table 4...................................................... 7 Deleted Bias Correction Update Section .................................... 37 Changes to Clock Control Section ............................................... 16 Changes to Table 115, Table 117, Table 119, and Table 121 .... 38 Changes to Figure 45 and Figure 46 ............................................ 21 Changes to Table 129 and Table 131 ........................................... 39 Changes to Table 9 ......................................................................... 24 Changes to Figure 66 ..................................................................... 42 Changes to Table 11 ....................................................................... 25 Changes to Table 102 and Table 106 ........................................... 35 10/2019Revision 0: Initial Version Changes to Table 108 and Table 110 ........................................... 36 Rev. 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