HCH-1000 Series Capacitive Humidity Sensors DESCRIPTION The sensor consists of a grid top electrode, a polyimide layer, The HCH-1000 series humidity sensor is a capacitive polymer and a bottom electrode. The grid top electrode on the bottom sensor designed for relative humidity measurement. The electrode provides enhanced sensitivity when compared to that sensor converts humidity value into capacitance, which can be of a standard structure. measured electronically. A cased version, for dust protection, and an uncased version are available. Polyimide is used as a humidity sensing material because of its inherent IC (Integrated Circuit) processing compatibility, reduced temperature dependence and enhanced resistance against contamination. The HCH-1000-Series is manufactured using semiconductor technology. FEATURES AND BENEFITS POTENTIAL APPLICATIONS Industrial Polymer sensing offers enhanced resistance against Air compressors contamination Battery-powered systems Reduced temperature dependence Drying equipment Semiconductor fabrication technology HVAC (includes air conditioning, air movement, Uses glass wafer as substrate thermostats, humidifiers, de-humidifiers, humidistats, Enhanced sensitivity and accuracy provides fast response enthalpy sensing) Low hysteresis and long-term stability OEM assemblies Office automation equipment Process equipment Refrigeration (includes bulk and transport systems) Telecommunications cabinets Weather stations and meteorology equipment Medical Hospital air compressors Infant incubators Microenvironments Sleep apnea equipment Treadmill stress monitoring equipment HCH-1000 Series Table 1. Specifications (T = 25 C 77 F , Input Voltage = 1 V , Frequency = 20 kHz) A RMS Characteristic Condition Min. Typ. Max. Unit Normal capacitance at 55 %RH 310 330 350 pF Sensitivity 10 %RH to 95 %RH 0.55 0.60 0.65 pF/%RH Humidity hysteresis 2 %RH Linearity 2 %RH Response time 30 %RH to 90 %RH 15 sec Temperature coefficient 5 C to 70 C 41 F to 158 F 0.15 0.16 0.17 pF/C Long-term stability (drift) 0.2 %RH/year Operating temperature range -40 -40 120 248 C F Operating humidity range 0% 100% RH Operating frequency range 1 100 kHz Figure 1: Frequency Characteristics Figure 2: Typical Humidity Response (Sensitivity = 0.6 pF/%RH.) 390 380 370 360 350 340 330 320 310 300 290 280 270 0 10 20 30 40 50 60 70 80 90 100 Relative humidity (%RH) Figure 3: Temperature Characteristics (At 1 V and 20 kHz.) RMS 2 www.honeywell.com/sensing Capacitance (pF)