Datasheet SFM4200 Digital Flow Meter for Air and Oxygen Flow range: 0160 slm Operating pressure up to 8 bar Very fast update time (0.5ms) Product Summary The SFM4200 sensor is Sensirions digital flow meter designed for high-volume applications. It measures the flow rate of air, oxygen and other non-aggressive gases with high accuracy. The SFM4200 is designed for flows up to 160 slm and can be operated at pressures up to 8 bar and is resistant against burst pressure up to 13 bar. The SFM4200 operates from a 5 Volt supply voltage and features a digital 2-wire I2C interface. The measurement results are internally linearized and temperature compensated. The outstanding performance of this sensor is based on Sensirions patented CMOSens sensor technology, which combines the sensor element, signal processing and digital calibration on a single microchip. The flow rate of the gas is measured by a thermal sensor element which assures very fast signal processing time and bidirectional measurement with best-in-class accuracy. The well-proven CMOS technology is perfectly suited for high-quality mass production and is the ideal choice for demanding and cost- sensitive OEM applications. Applications Medical Process automation Spectroscopy Environment monitoring Laboratory www.sensirion.com Version 1.2 Aug. 2018 1 / 13 1 Sensor Performance 1 1.1 Physical specifications Specification Condition Value Unit 2 Flow Range Air/O2 0 160 slm 5 span < 80 slm 2.5 % m.v. 3,4 5 Accuracy span > 80 slm 5 % m.v. offset 0.04 slm offset, typical 0.02 slm 6 Noise Level span < 80 slm, typical 0.5 % m.v. span > 80 slm, typical 1.2 % m.v. 10-100% FS 0.5 % m.v. Repeatability <10% FS 0.02 % FS Calibrated range 0 60 C 7 Temperature Sensor Accuracy +/- 2 C Accuracy Shift Due to Temperature span 0.1 %m.v./C 8 Variation offset 0.004 slm / C span < 80 slm, typical 0.3 Pressure Coefficient % m.v. / bar span > 80 slm, typical 0.6 60 slm <2000 Typical Pressure Drop 100 slm <4000 Pa 160 slm <9000 1.2 Ambient Conditions Parameter Condition Value Unit T(environment)=T(gas) Calibrated Temperature range 0 +50 C 15% rel.hum. 10-95% rel. hum. (non Operating Temperature Range 0 +50 C cond.) Max partial water Storage Temperature pressure 50hPa (non- -20 +70 C condensing) Operating Pressure Range absolute 8 bar Burst Pressure gauge 13 bar Use flow horizontally, electronic Orientation sensitivity connector up 1 Unless otherwise noted, all sensor specifications are valid at: 23C 2C, 966 mbar absolute pressure, with Vdd = 5V, calibration gas air, horizontal mounting position 2 slm: mass flow measured in standard liters per minute using reference conditions of T= 20C, p=1013 mbar 3 Including Offset, Non-Linearity, Hysteresis 4 Total accuracy/noise level/resolution is a sum of offset and span accuracy/noise level/resolution. 5 In % of measured value (m.v.) = of rate = of reading 6 Noise level defined as standard deviation of individual sensor readings, measured at full sampling rate (typical: average of noise level) 7 The measured temperature is the temperature of the bulk silicon in the sensor. This temperature value is not only depending on the gas temperature, but also on the sensors surroundings. Using the signal to measure solely the gas temperature will need special precautions, such as isolating the sensor from external temperature influences. 8 these effects need to be added to the initial values if applicable www.sensirion.com Version 1.2 Aug. 2018 2 / 13