SLI Liquid Flow Meter Series Media Isolated Microfluidic Flow Meter Liquid flow rates up to 10 ml/min Non-invasive measurement Different interface options 40 ms flow detection response time Product Summary The SLI Liquid Flow Meter enables fast, non-invasive measurements of very low liquid flow in the l/min- to ml/min-range. Excellent chemical resistance is ensured: The flow path of the SLI Liquid Flow Meter is formed by a simple, straight glass capillary. The fourth generation MEMS sensors combine a thermal high precision sensor element with amplification circuits and digital intelligence for linearization and temperature compensation on one single microchip the products core element. Interface Options Digital Analog 2 - I C-Bus - Voltage Output 0-10 V - RS485-Bus - Current Output 4-20 mA (0-20 mA) - USB Cable - Additional operation modes For more information on communication, please refer to page 8 of this document. Benefits of Sensirions CMOSens Technology High reliability and long-term stability Industry-proven technology with a track record of more than 15 years Designed for mass production Low signal noise www.sensirion.com / D1 Version 13 January 2020 1/15 Content SLI Liquid Flow Meter Series 1 1 Sensor Performance 3 2 Specifications 6 3 Sensor Output Signal Description 7 4 Communication Interface Description 8 5 Fluidic Specification and Connection 9 6 Mechanical Specifications 10 7 Ordering Information 11 8 CE, REACH, RoHS, and WEEE 12 9 Important Notices 13 10 Headquarters and Subsidiaries 14 www.sensirion.com / D1 Version 13 January 2020 2/15