Si501/2/3 32 KHZ100 MHZ CMEMS OSCILLATOR Features Wide frequency range: 32 kHz to User selectable tRise/tFall options 100 MHz Glitchless start and stop Contact Silicon Labs for Excellent short-term stability, long- frequencies above 100 MHz term aging Si501 single frequency w/ OE Industry standard footprints: Si502 dual frequency w/ OE/FS 2x2.5, 2.5x3.2, 3.2x5 mm RoHS compliant, Pb-free Si503 quad frequency w/ FS Short lead times: <2 weeks 20/30/50 ppm frequency stability including 10-year aging 20 to +70 C: Extnd commercial 40 to +85 C: Industrial LVCMOS output Low period jitter The Si50x family also includes the Low power Si504 for in-circuit programmability Continuous supply voltage range: (See the Si504 Data Sheet) +1.71 V to +3.63 V Applications Storage (SATA/SAS/PCIe) Office/Home automation General purpose processors IP cameras/surveillance Industrial controllers Display and control panels Embedded controllers Outdoor electronics Motor control Multi-function printers Flow control Office equipment Ordering Information: Description See Section 5. The Si501/2/3 CMEMS oscillator family provides monolithic, MEMS-based IC replacements for traditional crystal oscillators. Silicon Laboratories CMEMS Pin Assignments technology combines standard CMOS + MEMS in a single, monolithic IC to provide integrated, high-quality and high-reliability oscillators. Each device is factory tested and configured for guaranteed performance to data sheet specifications across 1 4 voltage, process, temperature, shock, vibration, and aging. FS/OE V DD Additional information on the Si50x CMEMS oscillator architecture and CMEMS technology is available in white papers on the Silicon Labs website at 3 GND 2 CLK www.siliconlabs.com/cmems. Functional Block Diagram Patents pending VDD LDO Digital Resonator Frequency-Locked VCO & Oscillator Loop (FLL) Temperature Sensor CLK Temp Comp / Digital Control NVM M RAMM ROM GND Rev. 1.0 6/14 Copyright 2014 by Silicon Laboratories Si501/2/3 FS/OE Si501/2/3 TABLE OF CONTENTS Section Page 1. Electrical Specifications                          .3 2. Si501/2/3 Typical Applications Circuits, AC Waveforms, and Functional Descriptions                               .8 2.1. Si501/2 Applications Circuits                      8 2.2. Si501/2 AC Waveforms and Functional Descriptions             .9 2.3. Si503 Applications Circuits                      10 2.4. Si503 AC Waveform and Functional Description              .11 3. Functional Description                          .12 3.1. OE Enable and Disable States                     .12 3.2. Output Rise and Fall settings                     13 4. Pin Descriptions                             .13 5. Ordering Guide                             14 5.1. Si501 Ordering Guide and Part Number Syntax              14 5.2. Si502 Ordering Guide and Part Number Syntax              15 5.3. Si503 Ordering Guide and Part Number Syntax              16 6. Package Dimensions and Land Patterns                   .17 6.1. Package Outline: 3.2 x 5 mm 4-pin DFN                 17 6.2. Package Outline: 2.5 x 3.2 mm 4-pin DFN                17 6.3. Package Outline: 2 x 2.5 mm 4-pin DFN                 17 7. Top Markings                              .18 7.1. 3.2 x 5 mm Top Marking                       18 7.2. 3.2 x 5 mm Top Marking Explanation                  18 7.3. 2.5 x 3.2 mm Top Marking                      19 7.4. 2.5 x 3.2 mm Top Marking Explanation                  .19 7.5. 2 x 2.5 mm Top Marking                       20 7.6. 2 x 2.5 mm Top Marking Explanation                  20 Document Change List                           .21 Contact Information                            22 2 Rev. 1.0