Silicon Microstructures | X-ON

Silicon Microstructures, Inc. develops and manufactures MEMS-based pressure sensors for applications in automotive, medical, and industrial markets. It offers ultra-low pressure digital sensors; low pressure digital sensors for respiration applications; and analog and digital low, medium, and ultra-low pressure sensors. The company also provides compensated low pressure and constant current drive sensors; biocompatible sensors; custom calibration solutions; absolute pressure, ultra-low pressure, and medium pressure die sensors, as well as backside pressure die sensors for harsh media applications; absolute pressure sensors for manifold designs, as well as uncompensated low pressure sensors; and prototype boards and other evaluation kits. In addition, it offers expertise in the areas ranging from special coatings used for the assembly process and media protection to advanced packaging methods for handling of ultra-small sensors; selection and development of suitable processes for handling, die-attach bonding, electrical contact, and media protection of the purchased die; and manufacturing services, such as design support, process development, and designs for manufacturability. The company was founded in 1991 and is based in Milpitas, California. As of March 13, 2001, Silicon Microstructures, Inc. operates as a subsidiary of ELMOS Semiconductor AG.

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