DATA SHEET HM Series The HM Series is ideal for high-volume, low and medium pressure, harsh-media applications. COMPANY: Merit Sensor is a leader in piezoresistive pressure sensing and partners with clients to create high performing solutions for a variety of applications and industries. SENTIUM: Merit Sensor products incorporate a proprietary Sentium technology, developed to provide a best-in-class operating temperature range (-40C to 150C) and superior stability. TECHNOLOGY: Merit Sensor utilizes a piezoresistive Wheatstone bridge in a design that anodically bonds glass to a chemically etched silicon diaphragm. All products are RoHS compliant. CAPABILITIES: Merit Sensor designs, engineers, fabricates, dices, assembles, and tests products from a state-of-the-art facility near Salt Lake City, Utah. FEATURES Range 15 to 500 psi (1 to 34.5 bar 103 to 3,447 KPa) Type Absolute pressurized from cavity side HM Series Part Number Configurator Gage pressurized from either side of the diaphragm HXX-XXXX-L2X Packing Media Air, gases and liquids that are compatible Impedance with silicon and glass T = Sawn wafer 1 = 5kohm on tape in Bridge Shipping Wafers on tape, waffle pack metal frame 2 = 3.5kohm W=Die in Bridge Flexibility Sensitivity, resistance, bridge, constraint, etc. waffle pack Backglass finish BENEFITS M = Au backmetal* Bridge Performance Enjoy best-in-class performance due to Merits C = Closed Constraint proprietary Sentium technology T = Closed with L2 = Absolute temp diode* NL2 = Gage Cost Save money over time with high-performing die Sensitivity V/V/psi Security Feel confident doing business with an experienced 1000 = 15 psi company backed by a solid parent company Example: 0300 = 100 psi (NASDAQ: MMSI) H1T-0300-L2MT 0090 = 300 psi Speed Get to market quickly with creative and offers 5kohm Impedance, 0070 = 500 psi flexible solutions Closed bridge with temp diode, 300 V/V/psi Service Experience prompt, personal, and sensitivity, absolute, * Optional professional support with Au backmetal Sales +1 801.208.4722 Customer Service +1 801.208.4700 Fax +1 801.208.4798 sensors merit.com www.MeritSensor.com 1600 W. Merit Parkway South Jordan, Utah 84095 USA HMseriesDS.009HM Series SPECIFICATIONS Parameter Minimum Typical Maximum Units Notes Electrical & Environmental Excitation (In) 5 15 V Maximum: 3 mA Impedance 4000 5000 6000 Optional: 3,500 +/- 500 Operating Temperature -40 150 C Sentium technology Storage Temperature -55 160 C Performance Offset -10 0 10 mV/V Zero pressure gage only 25C Non-linearity -0.2 0 0.2 % FSO Best Fit Straight Line 25C Pressure Hysteresis -0.1 0 0.1 % FSO 25C Temp Coeff Zero -25 0 25 V/V/C -40C to 150C Temp Coeff Resistance 2300 2800 3300 PPM/C -40C to 150C Temp Coeff Sensitivity -1500 -2200 -2500 PPM/C -40C to 150C U I = 40uA 350 530 800 mV Room Temp diode s 0.5 TC of U -4.0 -1.0 mV/C -40 to 150C diode Long-Term Stability -0.2 0 0.2 % FSO Long-Term Stability -0.4 0 0.4 % FSO (15psi only) 1.0 Burst Pressure 5X Full scale pressure Burst Pressure (500 psi part) 1500 psi Full-Scale Output ( 5 volts excitation) 1.0 15 psi (1 bar 103 KPa) 60 75 90 mV 100 psi (6.9 bar 689.5 KPa) 120 150 180 mV 0.51 Glass Other outputs available 300 psi (20.7 bar 2,068 KPa) 110 135 160 mV upon request 500 psi (34.5 bar 3,447 KPa) 140 175 210 mV 0.38 Silicon ELECTRICAL DIMENSIONS0.51 (millimeters, post cut) Glass V +IN Optional TEMP Bottom View Top View 2.08 0.5 0.5 0.71 V V -OUT +OUT 2.08 0.89 1.0 1.0 0.15 + Temp - - + IN O IN O 1.0 0.36 0.25 1.0 V -IN Side View 0.51 Glass 0.51 Glass 0.38 Silicon 0.38 Silicon 0.51 Glass 0.51 Glass Au backmetal (optional) P 2.08 2.08 Sales +1 801.208.4722 Customer Service +1 801.208.4700 Fax +1 801.208.4798 sensors merit.com www.MeritSensor.com 1600 W. Merit Parkway South Jordan, Utah 84095 USA 0.71 0.71 2.08 2.08 0.89 0.89 0.15 0.15 + Temp - - + IN O IN O + Temp - - + IN O IN O 0.36 0.25 0.36 0.25