Pressure
MP3V5100
Freescale Semiconductor
Rev 0, 4/2009
Integrated Silicon Pressure Sensor
MP3V5100
On-Chip Signal Conditioned,
Series
Temperature Compensated and
0 to 100 kPa (0 to 14.5 psi)
Calibrated
0.1 to 3.1 V Output
The MP3V5100 series piezoresistive transducers are state-of-the-art
monolithic silicon pressure sensors designed for a wide range of applications,
but particularly those employing a microcontroller or microprocessor with A/D
Application Examples
inputs. This transducer combines advanced micromachining techniques,
thin-film metallization, and bipolar processing to provide an accurate, high
Process Control
level analog output signal that is proportional to the applied pressure.
Patient Monitoring
Pump/Motor Control
Features
Pressure Switching
2.5% Maximum Error Over 0 to 85C
Ideally Suited for Microprocessor or Microcontroller-Based Systems
Thermoplastic (PPS) Surface Mount Package
Patented Silicon Shear Stress Strain Gauge
Available in Differential and Gauge Configurations
ORDERING INFORMATION
# of Ports Pressure Type
Package
Case Device
Device Name
Options No. Marking
None Single Dual Gauge Differential Absolute
Small Outline Package (MP3V5100 Series)
MP3V5100GC6U MP3V5100G
Rails 482A
MP3V5100GC6T1 MP3V5100G
Tape & Reel 482A
MP3V5100GP MP3V5100GP
Trays 1369
SMALL OUTLINE PACKAGE
MP3V5100GC6U/C6T1
MP3V5100GP
CASE 482A-01
CASE 1369-01
Freescale Semiconductor, Inc., 2009. All rights reserved.Pressure
Operating Characteristics
Table 1. Operating Characteristics (V = 3.0 Vdc, T = 25C unless otherwise noted, P1 > P2. Decoupling circuit shown in
S A
Figure 3 required to meet specification.)
Characteristic Symbol Min Typ Max Unit
(1)
P 0 100 kPa
Pressure Range OP
(2)
V 2.7 3.0 3.3 Vdc
S
Supply Voltage
Supply Current I 7.0 10 mAdc
o
(3)
V 0.11 0.18 0.25 Vdc
Minimum Pressure Offset (0 to 85 C) off
@ V = 3.0 Volts
S
(4)
V 2.81 2.88 2.95 Vdc
Full Scale Output (0 to 85 C) FSO
@ V = 3.0 Volts
S
(5)
V 2.7 Vdc
Full Scale Span (0 to 85 C) FSS
@ V = 3.0 Volts
S
(6)
%V
2.5
Accuracy (0 to 85 C) FSS
Sensitivity V/P 27 mV/kPa
(7)
t 1.0 ms
Response Time R
Output Source Current at Full Scale Output I 0.1 mAdc
O+
(8)
20 ms
Warm-Up Time
(9)
0.5 %V
Offset Stability FSS
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range.
3. Offset (V ) is defined as the output voltage at the minimum rated pressure.
off
4. Full Scale Output (V ) is defined as the output voltage at the maximum or full rated pressure.
FSO
5. Full Scale Span (V ) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
FSS
minimum rated pressure.
6. Accuracy (error budget) consists of the following:
Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range.
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to
and from the minimum or maximum operating temperature points, with zero differential pressure applied.
Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25 C.
TcSpan: Output deviation over the temperature range of 0 to 85 C, relative to 25 C.
TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85 C, relative to
25 C.
Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of V , at 25C.
FSS
7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
8. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized.
9. Offset Stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
MP3V5100
Sensors
2 Freescale Semiconductor