Pressure MPVZ5150 Freescale Semiconductor Rev 1, 05/2010 Integrated Silicon Pressure Sensor MPVZ5150 On-Chip Signal Conditioned, Series Temperature Compensated and 0 to 150 kPa (0 to 21.75 psi) Calibrated 0.2 to 4.7 V Output The MPVZ5150 series piezoresistive transducer is a state-of-the-art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced Typical Applications micromachining techniques, thin-film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the Level Indicators applied pressure. Process Control Pump/Motor Control Features Pressure Switching 2.5% Maximum Error over 0 to 85C Ideally suited for Microprocessor or Microcontroller-Based Systems Patented Silicon Shear Stress Strain Gauge Available in Gauge Surface Mount (SMT) or Through Hole (DIP) Configurations Increased media compatibility ORDERING INFORMATION of Ports Pressure Type Package Case Device Device Name Options No. Marking None Single Dual Gauge Differential Absolute Small Outline Package (Media Resistant Gel) (MPVZ5150 Series) MPVZ5150GC6T1 Tape & Reel 482A MPVZ5150G MPVZ5150GC7U Rail 482C MPVZ5150G SMALL OUTLINE PACKAGES MPVZ5150GC6T1 MPVZ5150GC7U CASE 482A CASE 482C Freescale Semiconductor, Inc., 2006, 2010. All rights reserved.Pressure Operating Characteristics Table 1. Operating Characteristics (V = 5.0 Vdc, T = 25C unless otherwise noted, P1 > P2. Decoupling circuit shown in S A Figure 3 required to meet electrical specifications.) Characteristic Symbol Min Typ Max Unit (1) P 0 150 kPa Pressure Range OP (2) V 4.75 5.0 5.25 V S DC Supply Voltage Supply Current I 7.0 10 mAdc O (3) V V Minimum Pressure Offset (0 to 85C) OFF DC 0.088 0.200 0.313 V = 5.0 V S (4) V V Full Scale Output Differential and Absolute (0 to 85C) FSO DC 4.588 4.700 4.813 V = 5.0 V S (5) V V Full Scale Span Differential and Absolute (0 to 85C) FSS DC 4.500 V = 5.0 V S (6) Accuracy Sensitivity V/P 30 mV/kPa (7) t 1.0 ms R Response Time Output Source Current at Full Scale Output I 0.1 mAdc O+ (8) 20 ms Warm-Up Time (9) 0.5 %V Offset Stability FSS 1. 1 kPa (kiloPascal) equals 0.145 PSI. 2. Device is ratiometric within this specified excitation range. 3. Offset (V ) is defined as the output voltage at the minimum rated pressure. OFF 4. Full Scale Output (V ) is defined as the output voltage at the maximum or full rated pressure. FSO 5. Full Scale Span (V ) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the FSS minimum rated pressure. 6. Accuracy (error budget) consists of the following: Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum or maximum rated pressure at 25C. TcSpan: Output deviation over the temperature range of 0 to 85C, relative to 25C. TcOffset: Output deviation with minimum pressure applied over the temperature range of 0 to 85C, relative to 25C. Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of V at 25C. FSS 7. Response Time is defined as the time for the incremental changed in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 8. Warm-Up Time is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized. 9. Offset Stability is the products output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. MPVZ5150 Sensors 2 Freescale Semiconductor