Pressure
MPX10
Freescale Semiconductor
Rev 14, 10/2008
+
10 kPa Uncompensated
MPX10
Silicon Pressure Sensors
Series
The MPX10 series silicon piezoresistive pressure sensors provide a very
0 to 10 kPa (0 to 1.45 psi)
accurate and linear voltage output, directly proportional to the applied
35 mV Full Scale Span
pressure. These standard, low cost, uncompensated sensors permit
(Typical)
manufacturers to design and add their own external temperature
compensation and signal conditioning networks. Compensation techniques
are simplified because of the predictability of Freescale's single element
Application Examples
strain gauge design.
Air Movement Control
Features
Environmental Control Systems
Low Cost Level Indicators
Patented Silicon Shear Stress Strain Gauge Design Leak Detection
Ratiometric to Supply Voltage Medical Instrumentation
Differential and Gauge Options Industrial Controls
Durable Epoxy Unibody Element or Thermoplastic (PPS) Surface Mount Pneumatic Control Systems
Package
Robotics
ORDERING INFORMATION
# of Ports Pressure Type
Package Case
Device
Device Name
Marking
Options No. None Single Dual Gauge Differential Absolute
Unibody Package (MPX10 Series)
MPX10D MPX10D
Tray 344
MPX10DP MPX10DP
Tray 344C
MPX10GP MPX10GP
Tray 344B
Small Outline Package (MPXV10G Series)
MPXV10GC6U MPXV10G
Rail 482A
MPXV10GC7U MPXV10G
Rail 482C
SMALL OUTLINE PACKAGE UNIBODY PACKAGE
MPXV10GC6U MPXV10GC7U MPX10D MPX10GP MPX10DP
CASE 344-15 CASE 344B-01 CASE 344C-01
CASE 482A-01 CASE 482C-03
Freescale Semiconductor, Inc., 2007-2008. All rights reserved.Pressure
Operating Characteristics
Table 1. Operating Characteristics (V = 3.0 Vdc, T = 25C unless otherwise noted, P1 > P2)
S A
Characteristic Symbol Min Typ Max Units
(1)
Differential Pressure Range P 0 10 kPa
OP
(2)
Supply Voltage V 3.0 6.0 V
S DC
Supply Current I 6.0 mAdc
O
(3)
Full Scale Span V 20 35 50 mV
FSS
(4)
Offset V 0 20 35 mV
OFF
Sensitivity V/ 3.5 mV/kPa
Linearity 1.0 1.0 %V
FSS
Pressure Hysteresis (0 to 10 kPa) 0.1 %V
FSS
Temperature Hysteresis 0.5 %V
FSS
Temperature Coefficient of Full Scale Span TCV 0.22 0.16 %V /C
FSS FSS
Temperature Coefficient of Offset TCV 15 V/C
OFF
Temperature Coefficient of Resistance TCR 0.21 0.27 %Z /C
IN
Input Impedance Z 400 550
IN
Output Impedance Z 750 1250
OUT
(5)
Response Time (10% to 90%) t 1.0 ms
R
(6)
Warm-Up Time 20 ms
(7)
Offset Stability 0.5 %V
FSS
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self-heating.
3. Full Scale Span (V ) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
FSS
minimum rated pressure.
4. Offset (V ) is defined as the output voltage at the minimum rated pressure.
OFF
5. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a
specified step change in pressure.
6. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the pressure is stabilized.
7. Offset stability is the products output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
MPX10
Sensors
2 Freescale Semiconductor