D6F-70AB71D-000-0

MEMS Flow Sensors D6F series Series Catalog Faster and more accurate than ever before MEMS flow sensor : the ideal means for mass flow measurement Omron ow sensor so precise even the ap of a butterys wings will not be missed.Realizing a highly accurate flow measurement, Omrons MEMS flow sensor accurately detects minute airflow so mmuuchch a ass a a si singnglele f flalapp of of a aa b bubuutttttteeerrrfffllyyysss wi wi wwiingnnngsn s.. A gas flow sensor capable of measuring mass flow independent ooff tteempmpeerraattururee a anndd pprprreeesssssursuurrereee.... D6F-A6 D6F-W Mass Flow Measurement Principles of MEMS Flow D6F Series There are two balloons; each having different volumes. Q1 No airow But these balloons have the same mass. Why is that? Temperature distribution The volume increases/decreases according to the pressure and Heater A temperature changes. The mass, on the other hand, Thermopile A Thermopile B remains constant regardless of the environmental changes. The mass flow measurement allows measurement performance that is not affected by the changes in the environment. Cross-sectional view of ow sensor chip During the absence of airow, the temperature Q2 Why is mass ofl w measurement required? distribution around the heater is symmetrical. When there is airow, the temperature of the An accurate measurement of the flow is required especially for A upwind side cools down and the temperature combustion control. Omrons flow sensor enables measuring the of the downwind side warms up, disrupting the symmetry of the temperature distribution. gas flow based on the mass flow measurement. 2