Liquid Leakage Sensor Amplifiers K7L-AT50/-AT50D Ultra-high sensitivity detects impedances of up to 50 M . Polyethylene makes the Sensing Band more resistant to chemicals. Series includes models with disconnection detection. *The color of the Sensing Band shown here is a conceptualization and is not necessarily the actual color.Features Sensing Bands boast high degree of chemical resistance. The K7L can be used in a wide range of applications, from semiconductor production installations to food-processing equipment. Inter-electrode Resistance Detection Application Examples Stable detection of liquids with Liquid Leakage Detection for impedances of up to 50 M and common water. Four sens- Measuring Baths in CMP Devices ing ranges are available, ensur- ing detection suited to the Liquid leaked to drain pans can be detected to prevent damage to application. devices and cleaning irregularities for wafers. Fresh water, pure water, distilled water, plating liquids, chemical liquids, IPA (isopropyl alcohol) AC Detection Method The K7L internally oscillates AC sig- Oscillator nals provided to the Sensing Band, Detection of Condensation and Liquid protecting the Sensing Band from Detector electric corrosion and ensuring safe Leakage at Semiconductor Production operation. Installations Current Detection is also possible for condensation inside cleaning devices and liquid leaked to the surroundings. Noise Canceller Function (Patent Pending) The K7L incorporates a noise cancel- ler circuit that uses a 3-conductor cable, ensuring a high level of noise K7L-AT50 immunity. Connecting cable Detection of Liquid Leakage at Pipe Joints for Liquid Chemical Tanks Liquid leakage at a pipe joint can be detected by wrapping the Sens- ing Band around the joint. Multiple Installation The power supply circuit and the detection circuit are iso- lated, allowing several Amplifi- ers to be installed in the same place. Detection of Cleaning Fluid Level for Sensing Band with Excellent Chemical Plating Devices Resistance The level of pure water is detected inside plating baths. High sensi- SUS316 and polyethylene tivity allows high-accuracy control to prevent cleaning irregularities. are used for the Sensing Bands core and sheath to ensure high resistance to both acidic and alkaline liq- uids. Note: Be sure to ground the baths if two or more K7L Sensors are used in the same tank in an explosion-prevention area. 2 Liquid Leakage Sensor Amplifier K7L-AT50/-AT50D