Micromachined Silicon Pressure Sensors Uncompensated and XPXL, XPX, Compensated and Calibrated XPCL, XPC Series FEATURES Low Cost, Small Size Temperature Compensated Zero and Span Calibrated MilliVolt Output Differential, Gage and Absolute Pressure Constant Voltage Excitation High Impedance Low Current The XPXL/XPX and XPCL/XPC Series sensors integrate silicon TYPICAL APPLICATIONS micromachined sensing technology, temperature compensation, and Medical Applications calibration in a complete family of low-cost packages. This series offers Applications Requiring the most cost-effective solution for design requirements. Small Size These piezoresistive pressure sensors use micromachined silicon Applications Requiring chips mounted on a ceramic and protected with a plastic cap. Several Vacuum and Positive tube arrangements with nylon housings are available for various pressure Pressure Reference, or applications. Both On devices of 5 psi and above, the topside of the chip is protected against humidity by a Silgel coating. While the sensors are designed for use with noncorrosive, nonionic pressure media, they accommodate many gases that are used in medical applications. WARNING WARNING PERSONAL INJURY MISUSE OF DOCUMENTATION DO NOT USE these products The information presented in this product sheet is for reference only. as safety or emergency stop Do not use this document as product installation information. devices or in any other Complete installation, operation, and maintenance information is application where failure of provided in the instructions supplied with each product. the product could result in Failure to comply with these instructions could result in death or personal injury. serious injury. Failure to comply with these instructions could result in death or serious injury. Sensing and Control Micromachined Silicon Pressure Sensors Uncompensated and XPXL, XPX, Compensated and Calibrated XPCL, XPC Series XPXL/XPX and XPCL/XPC Electrical Specifications at 12 0.01 Vdc Excitation 25 C* XPXL and XPX XPCL and XPC Min. Typ. Max. Min. Typ. Max. Units Excitation Voltage 3.0 12.0 16.0 3.0 12.0 16.0 Vdc Null -120 0 +120 -1.0 0 +1.0 mV Offset Temperature Shift (0 C to 70 C)** -- 0.5 -- -- -- 1.0 mV Full Scale Temperature Shift -2050 (0 C to 70 C)** -- PPM/C -- -- -- 2 % Span Linearity, Hysteresis Error*** -- 0.25 1.0 -- 0.25 1.0 % Span Input Resistance 5.0 -- -- 5.0 -- -- k Output Resistance -- 3.0 -- -- 3.0 -- k Operating Temperature -25 -- +85 -25 -- +85 C Storage Temperature -40 -- +125 -40 -- +125 C Common Mode Pressure 50 50 psi Proof Pressure 3X -- -- 3X -- -- FS Proof Pressure XPXL/XPCL 100 100 in H O 2 Burst Pressure 5X -- -- 5X -- -- FS Weight 2 2 gram *Note 1: All parameters are measured at 12 Vdc excitation, pressure specs obtained with pressure applied to the front of the sensor. **Note 2: Shift is relative to 25 C. ***Note 3: Measured at full scale rated pressure using BFSL. Equivalent Circuit Pinout 3 1. -V Excitation 2. + Output Signal 3. +V Excitation 4. - Output Signal 4 2 1 MEDIA COMPATIBILITY P1 PORT: DRY GASES ONLY. Media must be compatible with epoxy-based adhesive. P2 PORT: Media must be compatible with nylon housing, epoxy adhesive and silicon. 2 Honeywell Sensing and Control