DATA SHEET RS Series The Merit Sensor RS Series uncompensated packaged sensor is designed for the application of a wide range of pressures to the backside of the sensing element. The RS is a flexible platform with excellent media compatibility. COMPANY: Merit Sensor designs and fabricates MEMS piezoresistive pressure sensors at our Utah, USA engineering and fabrication facility. We focus on the customization of Merit Sensor is based in Salt Lake City, Utah technically superior pressure sensors to solve customers pressure sensing needs for the medical, industrial, automotive and aerospace industries. TECHNOLOGY: Merit Sensor utilizes a piezoresistive Wheatstone bridge with a chemically etched silicon diaphragm. All products are RoHS compliant. CAPABILITIES: Merit Sensor designs, engineers, fabricates, dices, assembles and tests all products from a state-of-the-art facility near Salt Lake City, Utah. FEATURES Uncompensated, packaged pressure sensor Pressure Range: 0 to 500psi (0 to 34.474bar) Temperature Range: -40C to +85C Type: Backside gage or backside absolute RS Series Part Number Configurator Media: Air, gases and liquids (to be determined on an application-by-application basis with Merit engineering team) RSXX-XXXX-XX-FX Shipping: Tape and reel Impedance Shipping Tray* Customization: Pressure range, pressure port, gage or absolute 1 = 5kohm F0 = Standard Tray Closed Bridge Excellent performance in both constant current and constant F1 = Custom Flex voltage applications pcb F2 = Custom Flex Simple pressure source attachment and electrical connection Constraint pcb Designed for a soldered connection to wires, ribbon cable, 1 = Absolute Port 2 = Gage flex strip, or surface mount pcb 2 = Ferrule 2.9mm PSI 3 = Ferrule 6.3mm 0015 = 15 psi Cap APPLICATION EXAMPLES 0100 = 100 psi 1 = Square Ceramic 0500 = 500 psi Cap Medical inflation *Default shipping method is Tape & Reel. Shipping Tray option is available. Water pressure and flow management Industrial process control Sales +1 801.208.4722 Customer Service +1 801.208.4700 Fax +1 801.208.4798 sales meritsensor.com www.MeritSensor.com Sales +1 801.208.4722 Customer Service +1 801.208.4700 Fax +1 801.208.4798 sales meritsensor.com www.MeritSensor.com 1600 W. Merit Parkway South Jordan, Utah 84095 USA 1600 W. Merit Parkway South Jordan, Utah 84095 USA RSseriesDS.004 RS Series RS Series SPECIFICATIONS Parameter Minimum Typical Maximum Units Notes DIMENSIONS FOR STANDARD PACKAGING OPTIONS (in millimeters) Electrical & Environmental Dimensions for reference only. Excitation (In) 5 15 V Maximum: 3 mA Engineering drawings (with tolerance) available upon order. Impedance 4000 5000 6000 Operating Temperature -40 85 C Storage Temperature -55 100 C Performance 2.2 1.3 2.2 1.3 Offset -10 0 10 mV/V Zero pressure gage only 25C 0.9 1.2 Non-linearity -0.2 0 0.2 % FSO Best Fit Straight Line 25C 0.9 1.2 Pressure Hysteresis -0.1 0 0.1 % FSO 25C Temp Coeff Zero -25 0 25 V/V/C -40C to 85C Temp Coeff Resistance 2300 2800 3300 PPM/C -40C to 85C 1.5 5.1 1.9 1.5 5.1 Temp Coeff Sensitivity -1500 -2200 -2500 PPM/C -40C to 85C Square 1.9 Square 2.9 Thermal Hysteresis -0.2 0 0.2 % FSO Zero pressure 2.9 2.7 Burst Pressure 2X Room Temperature 2.7 Full-Scale Output ( 5 volts Excitation) 3.2 3.4 0.5 3.2 3.4 0.5 15 psi (1 bar 103 KPa) 60 75 90 mV Closed bridge only 100 psi (6.9 bar 689 KPa) 120 150 180 mV 500 psi (34.5 bar 3447 KPa) 140 175 210 mV 6 X Pre-tinned pads 6 X Pre-tinned pads +E ELECTRICAL CROSS SECTION +E Square pads for mechanical Square pads for mechanical attachment only -O attachment only -O MEMS Sensing Element -E 7.7 -E 7.7 +O +O +E Solder Pad Solder Pad -O Ferrule (2.9mm) Ferrule (6.3mm) 9.0 9.0 -E 7.6 +O Ferrule 2.2 1.3 8.9 0.9 1.2 Pressure +E 5.1 3.1 Square 1.5 5.1 PACKAGING AND SHIPPING (millimeters) 1.9 Square 4.0 2.9 -Out +Out 4.9 2.0 0.7 2.7 3.2 3.4 0.5 24.0 -E 6 X Pre-tinned pads 16.0 +E Square pads for mechanical attachment only -O -E 7.7 +O 9.0 2.9 0.7 0 2.9 2.9 0.7 0 2.9 2.9 0.7 2.9 0 0.7 0.0 2.9 6.3