Pressure MP3V5050V Freescale Semiconductor Rev 2, 06/2010 High Temperature Accuracy MP3V5050V Integrated Silicon Pressure Sensor Series On-Chip Signal Conditioned, -50 to 0 kPa (-7.25 to 0 psi) Temperature Compensated and 0.1 to 2.8 V Output Calibrated The MP3V5050V sensor integrates on-chip, bipolar op amp circuitry and thin film resistor networks to provide a high output signal and temperature compensation. The small form factor and high reliability of on-chip integration Typical Applications make the Freescale Semiconductor, Inc. pressure sensor a logical and Vacuum Pump Monitoring economical choice for the system designer. The MP3V5050V piezoresistive transducer is a state-of-the-art, monolithic, signal conditioned, silicon pressure sensor. This sensor combines advanced micromachining techniques, thin film metallization, and bipolar semiconductor processing to provide an accurate, high level analog output signal that is proportional to applied pressure. Features 2.5% Maximum Error over 0 to 85C Ideally suited for Microprocessor or Microcontroller-Based Systems Temperature Compensated Over -40 to +125 C Patented Silicon Shear Stress Strain Gauge Durable Thermoplastic (PPS) Surface Mount Package Ideal for Automotive and Non-Automotive Applications ORDERING INFORMATION Package Case of Ports Pressure Type Device Device Name Marking Options No. None Single Dual Gauge Differential Absolute Small Outline Package (MP3V5050V Series) MP3V5050VC6U Rail 482A MP3V5050V MP3V5050VC6T1 Tape & Reel 482A MP3V5050V SMALL OUTLINE PACKAGE MP3V5050VC6U/6T1 CASE 482A Freescale Semiconductor, Inc., 2008, 2010. All rights reserved.Pressure Operating Characteristics Table 1. Operating Characteristics (V = 3.0 Vdc, T = 25C unless otherwise noted, P1 > P2) S A Characteristic Symbol Min Typ Max Unit Pressure Range P 50 0 kPa OP (1) V 2.7 3.0 3.3 Vdc Supply Voltage S Supply Current I 7.0 10 mAdc o (2) V 2.7 2.8 2.9 Vdc Full Scale Output (0 to 85 C) FSO V = 3.0 Volts (P = 0 kPa) S diff (3) V 2.7 Vdc Full Scale Span (0 to 85 C) FSS V = 3.0 Volts S (4) 2.5 %V Accuracy (0 to 85 C) FSS Sensitivity V/P 54 - mV/kPa (5) t 1.0 - ms Response Time R (6) 20 - ms Warm-Up Time (7) 0.5 - %V Offset Stability FSS (8) V 0.06 0.12 0.19 Vdc Pressure Offset (0 to 85 C) off 1. Device is ratiometric within this specified excitation range. 2. Full Scale Output (V ) is defined as the output voltage at the maximum or full rated pressure. FSO 3. Full Scale Span (V ) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the FSS minimum rated pressure. 4. Accuracy is the deviation in actual output from nominal output over the entire pressure range and temperature range as a percent of span at 25C due to all sources of errors, including the following: Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum or maximum rated pressure at 25C. TcSpan: Output deviation over the temperature range of 0 to 85C, relative to 25C. TcOffset: Output deviation with minimum pressure applied, over the temperature range of 0 to 85C, relative to 25C. 5. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 6. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the pressure has been stabilized. 7. Offset Stability is the product s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. 8. Offset (V ) is defined as the output voltage at the minimum rated pressure. off MP3V5050V Sensors 2 Freescale Semiconductor